UHP (Ultra High Purity) Series

Two-piece and three-piece UHP clean ball valves for clean gas and high-purity applications. Refer to each catalog for material, pressure, temperature and configuration limits. Availability and suitability depend on selected configuration and application.

UHP check valves for directional flow control in clean gas and high-purity systems. Refer to the catalog for material, pressure, temperature and configuration limits.

Manual and pneumatic UHP diaphragm valves across low, medium and high pressure classes, including standard and high-flow variants. Refer to each catalog for material, pressure, temperature and configuration limits. Availability and suitability depend on selected configuration and application.

Manual and pneumatic UHP bellows valves across low and medium pressure classes, including standard, forged, casted and Y-type body designs. Refer to each catalog for material, pressure, temperature and configuration limits. Availability and suitability depend on selected configuration and application.

UHP gas filters with ≥0.002 μm removal rating across low-pressure, high-pressure and high-flow classes. Refer to each catalog for material, pressure, temperature and configuration limits. Availability and suitability depend on selected configuration and application.

Ultra-high-purity pressure regulators for clean gas pressure control, covering the PR1, PR2, PRL1 and PRL2 regulator series. Refer to the catalog for material, pressure, temperature and configuration limits.

Integrated UHP gas system platform covering valves, check valves, regulators, filters, base blocks and gaskets. Refer to the catalog for material, pressure, temperature and configuration limits. Availability and suitability depend on selected configuration and application.