UHP Series
Filters, micro regulators and engineered systems for ultra-high-purity gas distribution.
UHP gas filters with ≥0.002 μm removal rating across low-pressure, high-pressure and high-flow classes. Refer to each catalog for material, pressure, temperature and configuration limits. Availability and suitability depend on selected configuration and application.
Ultra-high-purity pressure regulators for clean gas pressure control, covering the PR1, PR2, PRL1 and PRL2 regulator series. Refer to the catalog for material, pressure, temperature and configuration limits.
Integrated UHP gas system platform covering valves, check valves, regulators, filters, base blocks and gaskets. Refer to the catalog for material, pressure, temperature and configuration limits. Availability and suitability depend on selected configuration and application.
Catalogs are being added in batches. Reach out if you need pricing or specifications now.
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